Abstract

Diamond like carbon (DLC) films are considered as exciting candidates for biomaterials owing to high hardness and chemical inertness. However, the high resistivity of pure DLC films limited further applications in bioelectronic field. The palladium and phosphorus doped DLC film was fabricated by electrochemical deposition from the ethanol solution of Tetrakis (triphenylphosphine) platinum. The structure of the film was composed of CP, CP, CH, sp2–C, sp3–C bonds and Pd nanoparticles. The resistivity was evidently reduced due to the introduction of palladium and phosphorus, and the biocompatibility simultaneously enhanced. It will open up a new application direction for bioelectronic devices.

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