Abstract
Co80Pt20 cylindrical magnets (height, h=2 μm and diameter, Φ=5 μm and 10 μm) have been succesfully fabricated by electroplating through resist mask onto Cu(1 1 1) seed layer, at current density of 30 mA/cm2. Strong perpendicular magnetic anisotropy was observed owing to the large magnetocrystalline anisotropy, which yielded high perpendicular coercivity (4.7 kOe or 374 kA/m) and retentivity (6.2 kG or 0.62 T). Large energy product (6.52 MGOe or 52 kJ/m3) was achieved which compares favorably with that of bulk ferrites, rendering these structures potential candidates for hard magnetic componenets in MEMS.
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