Electrode Optimization of 100 MHz High-Frequency Quartz Resonator Based on Equivalent Mass Method

Abstract

Electrode optimization based on the equivalent mass method was carried out for a 100 MHz high-frequency fundamental thickness-shear AT-cut (quartz cut with a cutting angle of about 35.25° to the optic axis of the crystal) quartz resonator. Firstly, the electrode dimensions were optimized through three-dimensional finite-element modeling by the equivalent mass method. Secondly, on the basis of simulation results, 100 MHz fundamental frequency resonators were fabricated and quality factors were measured. The experimental and calculated results are highly consistent with the simulation results. The equivalent mass method combined with the finite-element method is confirmed to be applicable in the development of high-frequency quartz resonators.