Electrode microwave discharge in nitrogen: Structure and gas temperature

Abstract

Electrode microwave discharges in nitrogen at pressures of 1–16 Torr and input microwave powers of 30–180 W have been studied by space-resolved emission spectroscopy. It is shown that the discharge is highly nonuniform. The relative intensities of the first and second positive nitrogen bands, as well as of the first negative band of nitrogen ions, are found to vary significantly throughout a discharge because, in different discharge regions, emitting particles are excited by different mechanisms. The gas temperature was determined by the method of the unresolved rotational structure of different sequences of the emission spectra of the second positive system of nitrogen.