Abstract

To improve the controllability of ultrasonic linear motors in the longitudinal-bending mode, we have developed a multilayered transducer with independent electrode sets for the first longitudinal mode and the second bending mode. Since the vibration components are controlled independently by the transducer, it is possible to change only the driving vibration component with the component for friction control kept constant. The optimal shape and area of the electrodes in terms of efficiency were investigated analytically and experimentally. It was confirmed that an electrode shape in accordance with the mode strain contour gave a large output and that an optimum electrode area existed. The transducer with an optimal electrode pattern exhibited an efficiency improvement of approximately 10% and a 30% reduction of the temperature rise during motor operation.

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