Abstract
This paper investigates piezoelectric micro-actuators with different electrode configurations, i.e., interdigital, spiral and radial electrodes. Using the finite element method, electromechanical performance is evaluated and a comparison of the different micro-actuators is made for equal field strengths. Then, the actuators are considered for tunable lenses and optical parameters are estimated using ray tracing. The interdigital-electrode configuration performs best in both electromechanical and optical analysis.
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