Electrochromism in Sputtered WO 3 Thin Films

Abstract

There are large variations in the properties of sputtered under different conditions and two samples sputtered from an oxide target and reactively sputtered from a metal target were compared in detail. The thin film sputtered from an oxide target was found to color and bleach rapidly in 1 M in propylene carbonate, while the thin film reactively sputtered from a metal target could be colored deeply, but bleached only slowly. By calculating the rate of change of optical density during cyclic voltammetry, it was possible to directly compare the coloration response with the current/voltage behavior of the electrodes. In both cases at least two lithium insertion reactions appear to occur. The distinction between the two reactions was especially clear in the sample sputtered from a metal target, in which an insertion of high electrochromic efficiency occurred up to and then an insertion of considerably lower electrochromic efficiency up to . Although a small amount of coloration and bleaching continued to occur after switching the reactively sputtered sample to open circuit during the coloration and bleaching cycles, transmission change was largely halted by disconnecting the external current supply. The slow end to the bleach of the reactively sputtered sample corresponded to a reaction of high electrochromic efficiency.