Abstract
Barium and strontium titanate films were electrochemically synthesized onto Ti thin film prepared by RF sputtering. Applied current waveform was modulated to investigate the film growth mechanism. Superimposed cathodic pulses accelerated the formation of titanate thin films, and both the electrode surface pH and (Ba2+, Sr2+) ion size had a strong influence on film formation. Titanate film formation mechanism was investigated with a scanning electron microscope, an X-ray diffractometer and an electrochemical quartz crystal microbalance (EQCM).Insitu mass change of Ti electrode during electrolysis indicated that electrochemical method sets a limit to film growth.
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