Abstract
IrO2 thin films were prepared by radio frequency (rf) sputteringtechnique, and the supercapacitive properties of the films werestudied by cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) in 1 M LiNO3 electrolyte for the first time. The specific capacitance of the single IrO2 film electrode was calculated to be 293 F·g-1 at a scan rate of 5 mV·s-1for the sample prepared at room temperature.
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