Electrochemical micromachining using vibrating tool electrode

Abstract

This paper proposes an electrochemical micromachining method that makes use of a vibrating tool electrode. An equation of the dynamic voltage caused by a vibrating tool electrode is deduced. Using this equation, the dynamic voltage and its changes, along with system parameters, are investigated. This paper also describes an etching experiment on a steel plate, performed with an electrochemical micromachining system that uses a vibrating tool electrode. The results show that this type of electrochemical micromachining technique can significantly increase machining localization of the electrochemical micromachining.