Electrochemical Micromachining Using Real Pulse Signals

Abstract

The machining resolution of pulse electrochemical micromachining technology can be increased by shorting the pulse duration and changing the voltage signal waveform. With a triangular pulse, the energy per pulse was reduced by about two-thirds, and the machining gap was decreased by about eleven times compared to one with a rectangular pulse. Here, we put forward a real pulse waveform for electrochemical micro-machining. The pulse waveform is obtained by rectangular pulse plus differential circuits. The waveform can greatly reduce energy per pulse and surprisingly improve the precision of micro-electrochemical machining. The basic principle of the micromachining is analyzed. The equations of the machining accuracy and energy per pulse are deduced. Using the equations, the machining accuracy and energy per pulse as a function of the differential times of the differential circuits are calculated and compared with simulated and experimental results. Compared to the rectangular pulse, the energy per pulse for the waveform can be reduced by about six times and the machining gap was decreased can be improved by about 11 times. Using this method, some micro structures are produced and nanometer lever machining accuracy is realized which illustrates the proposed machining method.