Abstract
A two-dimensional computational model is developed to describe electrochemicalnanostructuring of conducting materials with ultrashort voltage pulses. The model consistsof (1) a transient charging simulation to describe the evolution of the overpotentials at thetool and workpiece surfaces and the resulting dissolution currents and (2) a feature profileevolution tool which uses the level set method to describe either vertical or lateral etchingof the workpiece. Results presented include transient currents at different separationsbetween tool and workpiece, evolution of overpotentials and dissolution currents as afunction of position along the workpiece, and etch profiles as a function of pulse duration.
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