Electrochemical Hydrogen Peroxide Sensor Based on Macroporous Silicon.

Naif Al-Hardan,Muhammad Abdul Hamid,Ensaf Al-Khalqi,Lim Kar Keng,Roslinda Shamsudin,Naser Ahmed

doi:10.3390/s18030716

Naif Al-Hardan, Muhammad Abdul Hamid + Show 4 more

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https://doi.org/10.3390/s18030716

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Abstract

Macroporous silicon was prepared through an anodization process; the prepared samples showed an average pore size ranging from 4 to 6 microns, and the depth of the pores in the silicon wafer was approximately 80 microns. The prepared samples were tested for hydrogen peroxide (H2O2) concentrations, which can be used for industrial and environmental sensing applications. The selected H2O2 concentration covered a wide range from 10 to 5000 μM. The tested samples showed a linear response through the tested H2O2 concentrations with a sensitivity of 0.55 μA μM–1∙cm–2 and lower detection limits of 4.35 μM at an operating voltage of 5 V. Furthermore, the electrode exhibited a rapid response with a response time of ca. two seconds. Furthermore, the prepared sensor showed a reasonable stability over a one-month time period.

Highlights

Macroporous silicon (MPS) has attracted the attention of several groups, owing to the well-known advantages of its large surface area and biocompatibility [1], as well as its showing promising behavior in several advanced applications, such as gas sensing [2,3], pH sensors [4], biochips [5], CMOS devices [6], drug delivery devices [1], biosensors [7,8], and in fuel cell devices [9] and waveguides [10].it can be integrated with silicon technology processes [11]
We reported on the application of zinc oxide (ZnO) nanorods for H2 O2 detection [31], the prepared ZnO nanorods showed a linear response in the range of 10 μM to 700 μM with a sensitivity of 295 nA μM–1 ·cm–2
The macroporous silicon (MPS) samples used in this study were fabricated using an anodization processor

Summary

Introduction

Macroporous silicon (MPS) has attracted the attention of several groups, owing to the well-known advantages of its large surface area and biocompatibility [1], as well as its showing promising behavior in several advanced applications, such as gas sensing [2,3], pH sensors [4], biochips [5], CMOS devices [6], drug delivery devices [1], biosensors [7,8], and in fuel cell devices [9] and waveguides [10] It can be integrated with silicon technology processes [11]. Sensitive and accurate determination of H2 O2 in different environments is required

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