Abstract
TiSiCN coatings were prepared using DC and RF magnetron co-sputtering system. The influence of target powers on phase structures, mechanical properties, tribological and electrochemical properties were studied. The results indicated the coatings presented an amorphous structure, and the highest microhardness of 1566.4 HV was obtained at a target power of 200 W. In terms of the electrochemical properties in coolant, the higher charge transfer resistance of 2.64 × 107 Ωcm2 and the polarization resistance (~1.10 × 108 kΩ.cm2) were obtained at low target power, indicating a better corrosion resistance. Furthermore, the friction coefficient was 1.01 ~ 1.14 as sliding against SUS440C balls in air. In contrast, the friction coefficient decreased to 0.45 ~ 0.58 in coolant, and the wear mechanism changed from oxidation wear into abrasive wear.
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