Abstract
Al-doped ZnO (AZO) films were deposited by mid-frequency (MF) sputtering technique as transparent anode materials for Li-ion batteries. The optoelectric and electrochemical behavior of the AZO film were investigated. The high transmittance of 84% in visible range and low electrical resistivity of 7.67 × 10−4 Ω·cm were obtained at sputtering pressure of 0.1 Pa. As a promising anode, the AZO films exhibit high specific capacity of 301 mA h/g. The results reveal that the resistivity of film had great influence on its electrochemical performance. A stable cycling retention was observed due to improved electric conductivity. However, the transparency of AZO film varied to 50% when recharged to 2.5 V, indicating the bleached and colored properties during lithiation/delithiation process. Those characteristics make it a potential candidate for electrochromic devices.
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