Abstract
ABSTRACTA micro-electromechanical diaphragm (MEMD) as micro-sensor platform is introduced. The performance of a MEMD is compared with that of a microcantilever (MC). It is theoretically found that the sensitivity of a MEMD is about 50 times higher than that of a MC. The measured resonance frequencies in air proved the validity of the MEMD design. More importantly, the quality merit factor (Q value) of MEMD is higher than that of MC. The damping effect of liquid medium on a MEMD is much smaller than on a MC. It is experimentally demonstrated that the MEMD works well in both air and liquid.
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