Abstract
We demonstrate the electro-thermal tuning of a MEMS VCSEL with a thermally actuated SiO2/semiconductor cantilever. The wavelength-temperature dependence of the MEMS VCSEL could be increased as large as 0.46nm/K, which is 6 times larger than that of conventional single-mode lasers. A micro-heater is integrated nearby the cantilever structure. A continuous wavelength tuning range of 4.7nm is obtained with heating power of 29mW.
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