Electro-thermal excitation of parametric resonances in double-clamped micro beams

Abstract

We report on a simple yet efficient approach allowing direct electrothermal excitation of parametric resonance (PR) in double-clamped flexible nano- and microscale beams. The application of a time-harmonic voltage between the beam's ends leads to the electric current and Joule's heating of the entire beam, which induces a time-periodic axial stress and results in excitation of the structure lateral vibrations through the PR mechanism. The proposed approach has an advantage, simplifying fabrication and integration and reducing the influence of residual stress, and thermal mismatch, unlike conventional piezoelectric, photothermal, or electrostatic actuation approaches, which require additional piezoelectric layers, light sources, or electrodes in the proximity of a vibrating beam. Single crystal silicon, nominally 500 μm long, 30 μm wide, and 5 μm thick beams were fabricated by deep reactive ion etching and operated at a pressure of ≈1.9 mTorr. The experimental results, consistent with the reduced order and numerical model predictions, demonstrate the feasibility of the suggested excitation scenario, which could be implemented in resonant sensors, timing devices, signal processing, and micro and nanomechanical logical elements.