Abstract
We investigate the electro-optic properties and high-frequency relative dielectric constants of epitaxially grown lanthanum-modified lead zirconate titanate (PLZT) and polycrystalline barium titanate (BaTiO3) films in a high-frequency range of up to 40 GHz for designing a high-speed ferroelectric thin-film modulator. We also demonstrate a ferroelectric thin-film Mach-Zehnder-type waveguide modulator using the epitaxially grown PLZT film. The use of a composite structure with a low dielectric coefficient substrate and a buffer layer enabled of a ferroelectric thin-film waveguide modulator with 40-Gb/s operation.
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