Abstract
We present an electrically tunable superconducting metamaterial capable of modulating terahertz (THz) waves. The device consists of two concentric ring resonators, which exhibits the electromagnetically induced transparency-like spectral response. A relatively high modulation depth of 86.8% and a group delay of 25.4 ps were achieved at the transmission window. The experimental and simulated transmission spectra show good agreement. The hybrid coupling model could well explain the physical mechanism. The tuning of group delay of THz waves is of great significance to the applications of THz technology.
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