Electrically tunable diffraction efficiency from gratings in Al-doped ZnO

Abstract

Transparent conducting aluminum-doped zinc oxide (AZO) can be used as part of an active plasmonic device due to its electrically tunable permittivity, which is accomplished by changing the carrier concentration with electrical biasing. In this letter, we report a continuous electrical tuning of diffraction efficiency from AZO gratings in the visible range (specifically 532 nm) when the AZO is under bias voltages between −1 V and −3.5 V. The carrier concentration in AZO under negative bias has been measured and simulated. The diffraction efficiency changes have been explained by the carrier concentration variation and induced complex refractive index change at the Al2O3 and AZO interface. The reported results can lead toward the application of post-fabrication tuning of optoelectronic devices using AZO.