Abstract
Electrical behaviors of amorphous carbon nitride (a-CNx) films following exposure to various gas species were investigated. The a-CNx film was prepared by reactive RF magnetron sputtering at 873 K. The resistivity of the film was measured in flowing He, N2, O2, Ar, and CO2. Regardless of gas species, the electrical resistivity of the a-CNx film dropped rapidly following gas injection and recovered in the evacuation process. This phenomenon is closely related to the changes in the film microstructure and electrical state. The response time in the adsorption process decreased with increasing gas pressure. The variation range of the electrical resistivity changed depending on the gas species.
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