Abstract
Epitaxial layers of ZnSe were grown on GaAs (100) by photostimulated vapor-phase epitaxy, using a He-Cd laser (power P⋍1 mW/cm2, hν=2.807 eV) at a substrate temperature of T= (175–300) K. The temperature dependences of the mobility of the majority charge carriers were studied in layers doped during growth, using such sources as AlCl3, Zn, Al, and Ga. Based on an analysis of the thermally stimulated current and thermally stimulated depolarization curves, parameters were established for seven deep local levels that have a substantial effect on the electrical characteristics of the heterostructures.
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