Abstract
In this paper the results are presented of an investigation of the electrical properties of polymer-like, diamond-like and graphite-like films obtained on an r.f.-powered electrode in the r.f. discharge of methane. It has been shown that the properties of films obtained by r.f. decomposition of methane depend on the value of the negative self-bias voltage of the r.f.-powered electrode. The changes in resistivity of the films obtained as a function of the changes in the value of the negative self-bias potential of an r.f. electrode are analogous to the changes presented in the literature for films obtained by the ion plating method and by ionized deposition from methane gas.
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