Abstract
In/TiO2/p-CdTe MOS diodes, which have a rectification coefficient of K = 6 × 103 at an external bias of 2 V, are fabricated for the first time by means of the inexpensive spray-pyrolysis method. It is established that tunnel-recombination processes in the MOS structures under investigation for forward and reverse voltages with the participation of levels at an energy depth of 0.25 eV are the dominant current-flow mechanism. The features of the voltage-capacitance characteristics of In/TiO2/p-CdTe MOS diodes testify to a sharp decrease in the resistance of the TiO2 high-resistance layer at forward bias, which is caused by the relation between the energy parameters of components of the MOS structure under investigation.
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