Abstract
Polycrystalline lead zirconate titanate (PZT) thin films were synthesized on titanium substrates at a processing temperature of 160degC for 16 hours by using a hydrothermal method. The effects of KOH concentration on the phase evolution and morphology of the films were investigated. The as-synthesized PZT thin films using KOH concentration of 4 mol/1 have a dielectric constant and loss of 515 and 0.35 at 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> Hz respectively. The dielectric loss, tandelta and leakage current of hydrothermal PZT thin films were reduced by additional annealing at 100-400degC in air. Moreover, the annealed hydrothermal PZT thin films exhibit typical ferroelectric hysteresis loops at room temperature.
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