Abstract
The Fermi level in bulk semi-insulating β-Ga2O3 doped with Fe (∼5 × 1018 cm−3) is found to be pinned near Ec − 0.85 eV. At temperatures ≥400 K, Ni Schottky diodes showed good rectification and measurable low frequency capacitance, allowing the measurement of capacitance-frequency (C-f), capacitance-voltage (C-V), and capacitance-temperature (C-T) characteristics. The activation energy and the electron capture cross section obtained were (0.75–0.82) eV and (2–5) × 10−15 cm2, in good agreement with the reported signature of the E2 electron trap assigned to Fe. The concentration of the filled centers determined from C-V was close to the concentration of residual shallow donors in undoped materials. Photoinduced current transient spectroscopy measurements showed that Fe doping does not promote the generation of high densities of deep traps other than those related to Fe.
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