Abstract
In this study, lead-free (Ba0.85Ca0.15)(Ti1-xZrx)O3 ceramics and a bimorph-type piezoelectric actuator were fabricated using the normal oxide-mixed sintering method, and their dielectric properties, microstructure, and displacement properties were investigated. From the results of X-ray diffraction, the pattern of the specimen has a pure perovskite structure. In addition, no secondary impurity phases were found. The excellent piezoelectric coefficient of d 33 =454 pC/N, the electromechanical coupling factor kp =0.51, the dielectric constant er =3,657, the mechanical quality factor Qm =239, and Tc(Tetragonal-Cubic) =90℃ were shown at x= 0.085. Δkp/kp20℃ and Δfr/fr20℃ showed the maximum value of -0.255 and 0.111 at -20℃ and 80℃, respectively. The maximum total-displacement was 60 μm under the input voltage of 50 V. As a result, it is considered that lead-free (Ba0.85Ca0.15)(Ti1-xZrx)O3 ceramics is a promising candidate for piezoelectric actuator application for x= 0.085.
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