Abstract
Al doped ZnO (AZO) films are fabricated by using sol-gel spin coating method and changes in electrical, optical and structural properties due to variation in film thickness is studied. AZO films provide c-axis orientation along the (002) plane and peak sharpness increased with film thickness is evident from XRD analysis. Conductivity (σ) of AZO films has increased from 2.34 (Siemens/cm) to 20156.27 (Siemens/cm) whereas sheet resistance (Rsh) decreases from 606300 (ohms/sq.) to 2.08 (ohm/sq.) with increase of film thickness from 296 nm to 1030 nm. Optical transmittance (T%) of AZO films is decreased from around 82% to 62% in the visible region. And grain size (D) of AZO thin films has been found to increase from 19.59 nm to 25.25 nm with increase of film thickness. Figure of Merit is also calculated for prepared sample of AZO. Among these four sample of AZO thin films, L-15 sample (having thickness in 895 nm) has provided highest figure of merit which is 5.49*10^-4 (Ω-1).
Highlights
Al doped ZnO (AZO) is considered as a promising candidate for transparent conductive oxide (TCO) due to its good opto-electronics properties
In recent years ITO is commercially most popular TCO material but it is expensive and there is a possibility of scarcity of indium in future.[3,4]
AZO films were deposited on the glass substrate using a spin coater
Summary
Al doped ZnO (AZO) is considered as a promising candidate for transparent conductive oxide (TCO) due to its good opto-electronics properties. As transparent conductive oxide having low resistivity, high optical transmittance in visible wavelength range, it has wide application in optoelectronic devices.[1,2] In recent years ITO is commercially most popular TCO material but it is expensive and there is a possibility of scarcity of indium in future.[3,4] To find appropriate alternative of ITO, a group of materials have been investigated so far. This group containing zinc-oxide (ZnO), aluminum doped zinc-oxide (AZO), gallium doped zinc-oxide (GZO), fluorine doped tin oxide (FTO) etc. All of these films AZO is the most superior alternative of ITO because it has good electrical and optical properties, containing nontoxic, abundant, inexpensive materials and low cost in fabrication.[5]
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