Abstract

Dielectric barrier discharge (DBD) excimer or exciplex lamps are known as efficient UV and VUV sources but their power supply operates at a high voltage (some kV) and at a frequency of some tens of kHz. Consequently, for industrial applications, DBD lamps need specific power supplies, designed for one lamp geometry and gas filling. The aim of this work is to provide an improved electrical model for a homogeneous DBD which can provide relevant electrical parameters such as gas voltage drop, total current, sheath voltage and current, surface charge deposited on the dielectric surfaces but can allow for fast simulation times.

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