Abstract
DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar. The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters. The breakdown voltage is a product of the Argon gas pressure inside the chamber and gab distance between the electrodes, represent as Paschen curve. The Current-voltage characteristics curves indicate that the electrical discharge plasma is working in the abnormal glow region. Plasma parameters were found from the current-voltage characteristics of a single probe positioned at the inter-cathode space. Typical values of the electron temperature and the electron density are in the range of (2.93 –5.3) eV and (10-16 -10-17) m-3 respectively.
Highlights
DC glow discharges are very important technique used for depositing thin films, oxidization, plasma polymerization, etching, and pumping gas discharge lasers, etc, for this reason the research in the glow discharge is of considerable interest [1, 2]
The plasma parameters; electron temperature, electron density and axial electric field will be changed from one region to another under the same condition
This paper reports the results of electrical and plasma parameter of homemade DC glow discharge plasma system where it can be used to enhance the sputtering process
Summary
DC glow discharges are very important technique used for depositing thin films, oxidization, plasma polymerization, etching, and pumping gas discharge lasers, etc, for this reason the research in the glow discharge is of considerable interest [1, 2]. Plasmas are ionized gases; where, consist of electrons, positive ions and neutral particle gas. For these reason, the ignition of the dc glow discharge at low pressure was one of the earliest problems in the study of gas discharges. The use of electrostatic probes is the simplest experimental technique to measure the properties of the plasmas [7]. This technique was introduced and developed by Irvin Langmuir about fifty years ago, and contently is sometimes called the method of Langmuir probes. Electrostatic Langmuir probes are one of the basic tools of the plasma physicist for measuring electron densities, temperatures, and energy distributions. Almost all other techniques, such as spectroscopy or microwave propagation, give information averaged over a large volume of plasma [10]
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