Abstract
The electrical conductivity and thermal stability of sputtered chromium oxide films were investigated in order to assess their potential as protective coatings for high temperature battery electrode materials. Sheet conductivities as high as 10–15 Ω -1 cm -1 were achieved in air at a temperature of 350 °C. Film property changes resulting in reduced electrical conductivity (several orders of magnitude) occurred when the films were heated in vacuum. Electrical conductivity and electron beam methods were used to study the nature of the film instability. It is proposed that the instability is related to both structural and compositional (oxygen) changes in the sputter-deposited films.
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