Abstract
The developing area of plasmonics has led to the possibility of creating a new type of high-speed, high-sensitivity optical sensor for biological environment analysis. The functional layer of such biosensors are nanoscale films of noble metals. In this work we suggest using a thin film of titanium as a functional layer. This paper presents the results of the research on electrical and optical characteristics of 5 to 80 nm thick titanium films deposited on sapphire substrates by magnetron sputtering. It is shown that surface plasmon resonance is consistently observed in the investigated titanium films and the theoretical grounds of surface plasmon resonance excitement is given. In structures with titanium films less than 15 nm thick, local plasmon resonance is observed along with surface plasmon resonance. Local plasmon resonance is more sensitive to the surface state of a thin film of titanium, which on the one hand increases the sensitivity of a biosensor, and on the other hand imposes restrictions on the parameters of nanoscale films.
Highlights
There has recently been increased scientific and applied interest in surface plasmons: collective vibrations of metal conduction electrons excited by an electromagnetic wave of light radiation at the interface with a dielectric [1,2,3,4,5]
The surface plasmon resonance of such films is shifted to the ultraviolet spectrum area, which makes their application in optical sensors more difficult [6,7,8]
The electrical resistivity of films deposited by magnetron sputtering was significantly higher than that of films deposited by thermal evaporation [9]
Summary
There has recently been increased scientific and applied interest in surface plasmons: collective vibrations of metal conduction electrons excited by an electromagnetic wave of light radiation at the interface with a dielectric [1,2,3,4,5]. The excitement of surface plasmon resonance is accompanied by the increased luminescence of the medium, absorption of light radiation, Raman scattering, etc. One of the promising applications of systems where surface plasmon resonance is excited is optical sensors for biological medium analysis [2,3,4,5]. The use of less precious inert metals can extend the applicability and availability of surface plasmon resonance-based biological sensors
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