Abstract

N-channel MOSFET's of different dimensions were first irradiated with /sup 60/Co Gamma rays source at several total doses (low doses) and then their gate oxides, SiO/sub 2/ and interfaces, Si/SiO/sub 2/ were characterized by using the standard charge pumping (CP) and the extended standard CP to low frequencies techniques. Both techniques reveal two radiation-induced oxide charge traps formation mechanisms, caused by low radiation total doses. Initially, there is a build-up of positive charge in the oxide layer, followed later by diminution of net positive charge (turn around effect) due to generation of negative charge or/and transformation of positive oxide traps to interface traps. While the interface traps exhibit a linear increase with radiation doses.

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