Electrical Characterization and Microstructures of Bi<sub>4-</sub><sub>x</sub>Gd<sub>x</sub>Ti<sub>3</sub>O<sub>12</sub> Thin Films

Abstract

Gd2O3-doped bismuth titanate (Bi4-xGdxTi3O12: BGT) and pure Bi4Ti3O12 (BIT) thin films with random orientation were fabricated on Pt/Ti/SiO2/Si substrates by rf magnetron sputtering technique. These samples had polycrystalline Bi-layered perovskite structure without preferred orientation, and consisted of well developed rod-like grains with random orientation. Gd-doping into BIT caused a large shift of the Curie temperature ( TC ) from 675 °C to lower temperature and a improvement in dielectric property. The experimental results indicated that Gd doping into BIT also result in a remarkable improvement in ferroelectric property. The Pr and the Ec values of the BGT film with x=0.75 were 28 μC/cm2 and 65 kV/cm, respectively.