Abstract

AbstractWe investigated the role of Ga in solution‐processed InGaZnO thin film transistors (TFTs). The incorporation of Ga into a InZnO compound system results in a decrease in the carrier concentration of the films and an off‐current of TFTs. This is a result of the Ga ions forming stronger chemical bonds with oxygen, as compared to the Zn and In ions, acting as a carrier suppressor. It was verified, using X‐ray photoelectron spectroscopy (XPS), that the vacancy‐related oxygen 1s peak was decreased when the Ga content increased.

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