Abstract
ABSTRACTWe studied the behavior of mobile charges, which we believe are hydrogen ions, in a novel spin-on oxide, SOX. Our analysis is based on the Triangular Voltage Sweep (TVS) technique, which is normally used to detect the presence of mobile alkali ions in silicon dioxides. We found that the TVS traces of protons exhibit several unique features that allow us to distinguish a proton signal from that of other common contaminants, such as sodium. We suggest a model to explain these unique features. We show that the presence of hydrogen in the SOX material is due to the high water retention of this porous oxide.
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