Abstract

A p-Si/n+-6H-SiC heterojunction non-ultraviolet photodiode is fabricated on 6H-SiC substrate. Non-UV light operation of the SiC devices is initially realised. J-V measurement indicates that the heterojunction has good rectifying behaviour with a turn-on voltage of ∼1 V. Under non-UV light illumination of 0.6 W/cm2, the device exhibits good photo-response with a maximum open circuit voltage Voc of 92.0 mV and photocurrent Iph of 0.6 mA/cm2.

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