Abstract

We have prepared pure Titanium dioxide (TiO 2 ) and Zinc (Zn) doped TiO 2 thin films by spray pyrolysis deposition (SPD) technique. The deposition temperature of the prepared thin films was maintained at $450^{\mathrm{o}}\mathrm{C}$ The structural property of the prepared thin films was characterized by X-ray diffraction (XRD) method. The results of XRD data showed that the structure of the as-deposited thin films was amorphous phase. The surface morphology and composition of the thin films were investigated by scanning electron microscope (SEM) and energy dispersive X-ray Spectroscopy (EDS), respectively. The electrical property, in particular, electrical resistivity was observed by four-point probe method as a function of temperature. It is depicted that the resistivity decreased with increasing temperature and exhibited semiconducting nature of the sample. The optical transmittance was measured by the UV-visible spectrometer. The transmittance for the pure TiO 2 was found about 70% in the visible region.

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