Electrical and optical properties of hydrogen plasma treated β-Ga2O3 thin films

Abstract

The behavior of H in β-Ga2O3 is of substantial interest because it is a common residual impurity that is present in β-Ga2O3, regardless of the synthesis methods. Herein, we report the influences of H-plasma exposure on the electric and optical properties of the heteroepitaxial β-Ga2O3 thin films grown on sapphire substrates by chemical vapor deposition. The results indicate that the H incorporation leads to a significantly increased electrical conductivity, a greatly reduced defect-related photoluminescence emission, and a slightly enhanced transmittance, while it has little effect on the crystalline quality of the β-Ga2O3 films. The significant changes in the electrical and optical properties of β-Ga2O3 may originate from the formation of shallow donor states and the passivation of the defects by the incorporated H. Temperature dependent electrical properties of the H-incorporated β-Ga2O3 films are also investigated, and the dominant scattering mechanisms at various temperatures are discussed.