Abstract

Transparent conductive oxide tungsten-incorporated cadmium oxide (CdO) thin films were deposited on glass substrates by a vacuum evaporation technique. The structural, electrical, and optical properties have been investigated as functions of tungsten (W) doping content. The results show that W ions occupy structural interstitial positions in addition to accumulating on crystallite and grain boundaries. The bandgap of W-incorporated CdO films suffers narrowing that was studied within the framework of the available phenomenological models. The electrical study shows that W-incorporated CdO films are degenerate semiconductors. The lowest resistivity of 3.85 × 10−4 Ω cm was achieved, with carrier mobility of 39.2 cm2 V−1 s−1 and carrier concentration of 4.13 × 1020 cm−3, for W incorporation of 0.1%. The average transmission attained was ~80% in the near-infrared (NIR) spectral region, with the optical bandgap ranging from 1.77 eV to 2.0 eV.

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