Abstract

Electrical and luminescent properties of N-polar undoped GaN films grown using low temperature GaN buffers on on-axis and miscut sapphire and on-axis AlN buffers are compared to the properties of Ga-polar films grown on low temperature GaN buffers. It is shown that the concentration of residual donors increases by about an order of magnitude for on-axis N-polar growth and by two orders of magnitude for off-axis growth compared to Ga-polar films. On-axis films for both Ga-polar and N-polar polarities show the presence of n + interfacial layers greatly influencing the apparent electron concentration and mobility deduced from capacitance–voltage C– V measurements. These interfacial layers are much less prominent in the miscut N-polar films. Growth on N-polar greatly increases the concentration of electron traps with activation energy of 0.9 eV possibly related to Ga-interstitials.

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