Electric spike emergence and synchronization during wet etching of overlapping low energy light ion microbeam-irradiated polymers

Abstract

Electric spike emission was observed for the first time for thin polymer foils irradiated with low energy light ion microbeams at overlapping fluences, when placing them in between two vessels filled with etchant and distilled water, respectively, and applying a low sinusoidal transverse voltage. The various shapes of recorded spike types are described and examined. From their emergence that occurs after different derived etching times, and the inter-correlation of different spike parameters, we draw the first conclusions about their formation mechanism, behavior, and usefulness for technical applications.