Abstract
Uniaxial magnetic anisotropy of the films can be induced in ferromagnetic thin films evaporated at oblique incidence even in absence of a magnetic field. The induced uniaxial magnetic anisotropy was remarkable in multilayered films formed varying the oblique incidence angle, and the easy axis of the anisotropy is along the perpendicular direction of the incidence of evaporation. In this paper, we have discussed the origin of the uniaxial magnetic anisotropy of Fe/Si multilayered films, prepared by varying the oblique evaporation angle, from the viewpoint of electric resistance. The tendency in the incidence angle dependence of uniaxial magnetic anisotropy is in agreement with that of the angle dependence of the electric resistance ratio. The origin of the uniaxial magnetic anisotropy of thin films induced by oblique angle deposition is due to anisotropic arrangement of atoms in the films.
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