Electric Micro-Propulsion in Low Temperature Co-fired Ceramics

Abstract

This work focuses on the fabrication and assembly of miniature inductively-coupled plasma (ICP) electrostatic thrusters using DuPont's 951 Low Temperature Co-Fired Ceramics (LTCC). The use of LTCC allows for integration of electrical and fluidic features inside a hermetically sealed device that is resistant to plasma erosion. LTCC also allowed for the creation of cylindrical and planar structures which could be mated to form a single device. The thruster consists of a planar base, an antenna disc, and a plasma containment cylinder. The planar base contains internal fluid distribution channels as well as electrical interconnections. The antenna disc houses straight-through gas ports, electrical interconnects, as well as a planar spiral ICP antenna. The containment cylinder is used to contain argon plasma created by a radio frequency (RF) signal sent through the ICP antenna. The development of the fabrication process will be presented for the incorporation and alignment of all three LTCC components together to create a single thruster body. The results of the electrical and fluidic integration of the device will be evaluated and presented.