Abstract
In this study, pyrolyzed photoresist films (PPFs) were prepared using commercial SU8 photoresist by proton irradiation and pyrolysis. SU8 thin films were irradiated with high-energy proton ions and then pyrolyzed in a tube furnace at 1000 °C under inert atmosphere. The carbonization yield of the PPFs increased with an increasing fluence due to the formation of more crosslinked network structures at a higher fluence. The electrical resistance decreased with an increasing fluence due to the higher remaining thickness and carbonization yield at a higher fluence. Therefore, the PPFs prepared at 1 × 1016 ions/cm2 showed the maximum temperature of 150 °C at 20 V and a high electric power efficiency of 1.57 mW/°C.
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