Abstract
In electronic devices, magnetic disks and micromechanical systems, thin films are widely used. Improvement of their mechanical reliability requires invetigations of methods for evaluating fracure strength of thin films coated on substrates. In order to develop a method for evaluation of fracture strength by means of indentation with a small spherical indenter, an elasto-plastic finite-element stress analysis for the case of an elastic film and a plastic substrate is carried out in this paper. The analysis shows that radial tensile stress or occurs in the film beyond the contact area. An approximate equation for the distribution of σr is derived, which is useful for evaluation of the fracture strength.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.