Elastic Variation of Quasi-One-Dimensional Cubic-Phase GaN at Nanoscale

Abstract

The elastic properties of the cubic (c-) phase GaN confined in a nanoscale one-dimensional (1D) v-grooved Si(001) substrate are investigated. Along a ∼900 nm-wide v-groove formed with two facing Si(111)-type facets, sub-micrometer-wide c-GaN is achieved by the hexagonal- to c-phase (h–c) transition from the h-GaN which plays the role of an interlayer in its epitaxy on Si. The resulting nonplanar stack of c-GaN/h-GaN on Si has complicated stress distribution. This work focuses on the elastic properties the c-GaN, which are critically affected by its low dimensionality, and presents experimental evidence for it with an analytical stress modeling. A reciprocal lattice map reveals that the c-GaN in each groove consists of several micrometer-long single crystals which are microscopically tilted from each other in their serial coalescence, as its unit structures. The corresponding micrometer-scale lateral correlation length, dc, results from the h–c transition that is interrupted by the groove imperfections gen...