Abstract
The interatomic binary potentials of Mo-Mo, Mo-S and S-S, approved by Molecular Dynamics, were used to calculate elastic phase shifts and cross sections of the atomic pairs in the relative kinetic energy range of 2–200 eV. It is expected the obtained differential and integral cross sections to be of help to describe sputtering of MoS2 nanometer layers in design of perspective devices of nanoelectronics and photonics.
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