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Abstract
A comprehensive data set is presented that covers eigenvalues and dynamic stiffness of picket-shaped microcantilevers for a wide range of the taper ratio and tip mass ratios. The shape of these microcantilevers is such that most of the length is of uniform cross section and the end segment of the beam is width-tapered to a point at the free end. This configuration is widely used in MEMS devices. Closed form expressions are presented for the eigenvalues, and for static and dynamic stiffness. These expressions could help designers and researchers in the MEMS field in general, and atomic force microscopy in particular.
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